Microfluidic chips are miniaturized laboratory systems for controlling and manipulating tiny liquid fluids. Among other things, the material of the chip is crucial as it can directly affect the performance and stability of the chip.
常用的微流控芯片材料之一是玻璃。玻璃具有许多优点,如优异的化学稳定性、透明度、高温稳定性和耐腐蚀性等。
此外,玻璃还具有平整表面和均匀的孔洞分布,这些特性使得制造微流控芯片更加容易和可控。
在玻璃材料中,常用的有石英玻璃、硼硅玻璃和热熔玻璃等。其中,石英玻璃具有高透明度、耐高温和耐腐蚀性等特性,是制造微流控芯片的首选材料之一。
硼硅玻璃具有高温稳定性和良好的光学特性,常用于制造生物芯片。热熔玻璃具有较高的化学稳定性和均匀的孔洞分布,通常用于制造微流控反应器。
In summary, glass is one of the preferred materials for the fabrication of microfluidic chips, and different types of glass materials can be selected according to different application requirements.
1.BF33 Glass
BF33 glass is a borosilicate glass whose composition mainly consists of SiO2 (68.1%), B2O3 (14.1%), Na2O (9.3%), and Al2O3 (7.1%).BF33 glass has excellent optical properties, good light transmittance, good resistance to acid and alkali corrosion, and can withstand high temperatures and high pressures, and is easy to be processed into complex shapes. Therefore, it is often used to make channels and reaction cells in microfluidic chips.
2.B270 glass
B270 glass is an alkali metal magnesium-aluminum silicate glass, whose composition mainly includes SiO2 (69.2%), Al2O3 (1.3%), MgO (3.3%), K2O (8.8%) and Na2O (16.6%).B270 glass has excellent flatness and optical properties, high surface homogeneity, high resistance to corrosion from acids and alkalis, and high thermal and chemical stability. Therefore, it is often used to make the bottom substrate in microfluidic chips.
3.D263 Glass
D263 glass is a silicate glass whose composition mainly includes SiO2 (64.8%), Na2O (8.6%), Al2O3 (3.9%), MgO (4.2%), and CaO (7.6%).D263 glass is characterized by high transparency, low fluorescence, and low free-ion content, and therefore, it is widely used in optical devices. In microfluidic chips, D263 glass can be used to make micro channels and reaction cells.
A comparison of their differences is shown in the table below:
characterization | BF33 | B270 | D263 |
ingredient | SiO2、B2O3、Al2O3 | SiO2、Al2O3、MgO、Na2O、K2O | SiO2、Al2O3、Na2O |
Chemical resistance | good | Average | bad |
transparency (of light) | good | good | good |
heat resistance | good | good | Average |
processing performance | Average | good | good |
Price | moderate | moderate | cheaply |
It should be noted that the above only lists some of the main characteristics and advantages and disadvantages of BF33, B270 and D263 glass, and does not mean that in the microfluidic chip manufacturing can only be used in these three materials, there are other types of glass materials are often used in microfluidic chips.
1 Wet corrosion
湿法腐蚀是一种常见的微流控玻璃芯片加工方式。通过在玻璃芯片表面镀一层耐酸碱的铬层和光刻胶,然后用铬层和光刻胶层共同作为掩模,在酸或碱性溶液中进行腐蚀。
通过控制腐蚀时间和腐蚀液的配方,可以制造出各种形状的微通道和微结构。
2 Laser Processing
Laser processing is a high-precision way to process microfluidic glass chips. Laser processing can realize the preparation of microchannels and microstructures of different shapes and sizes by adjusting the laser power and focusing distance. Laser processing can realize high-precision processing and non-contact processing, which can fabricate more complex microfluidic chips.
3 Machining
Machining is a traditional microfabrication technology, which mainly includes methods such as CNC machine processing, glass cutting, and grinding processing. The advantage of machining methods is that highly precise microstructures can be processed, while different shapes can be processed using different processing tools. However, machining methods also have some limitations, such as slower processing speed, higher cost, easy to produce debris and other problems.
Dxfluidics offers the following models of blank glass and etching glass (chrome + photoresist).
Glass Model | Glass thickness | Glass size | Chromium thickness/,adhesive layer thickness |
BF33/chrome plate glass | 1mm 2mm | 101.6×101.6mm 127x127mm 152.4×152.4mm | 180nm/500nm |
D270 | 1mm 2mm 4mm | 101.6×101.6mm 127x127mm 152.4×152.4mm | 180nm/500nm |
D263 | 0.7mm | 101.6×101.6mm 127x127mm 152.4×152.4mm | 180nm/500nm |
DingXu (Suzhou) Microfluidics Technology Co., Ltd. is a high-tech enterprise dedicated to the field of microfluidics. We are committed to providing customers with comprehensive microfluidic solutions, including customized microfluidic chip development, surface modification, microfluidic chip processing equipment, and microfluidic instruments. Our team boasts extensive experience and technical expertise, continuously combining professional knowledge with innovative thinking to deliver high-quality solutions. We consistently prioritize customer-centric values, embrace self-challenges, and pursue excellence. Through professionalism, innovation, and collaboration, we aim to create greater value for our customers and contribute to a brighter future in the field of microfluidics.
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