Coating process

Coating process

Coating is a technique in which a material (commonly known as a target or film) is deposited on the entire surface of a substrate under vacuum conditions using physical bombardment or chemical reaction.

Low Pressure Chemical Vapor Deposition (LPCVD)

SiNx, Intra-sheet uniformity: <±5%

Plasma Enhanced Chemical Vapor Deposition

SiO₂, SiNx, a-Si (B,P,Ge doped)

Inductively Coupled Chemical Vapor Deposition

SiO₂, SiNx, SiC (low-temperature, low-stress coating)

atomic layer deposition

Al₂O₃、HfO₂、AlN

Optical Coating

SiO2、MgF2、ITO、TiO2、Ta2O5、ZrO2、Al2O3

sputtering deposition

Ti、Al、Ni、Au、Ag、Cr、Pt、Cu、TiW90、Pd、Pt、Zn、Mo、W、Ta、Ru、Si、SiC、NiCr20、Nb

Electron beam evaporation

Ti，Al，Ni，Ag，Cr，Sn，Pt，AuGe

thermal evaporation

Sn，AuSn，Ag，Au

Case Studies