Coating is a technique in which a material (commonly known as a target or film) is deposited on the entire surface of a substrate under vacuum conditions using physical bombardment or chemical reaction.
SiNx, Intra-sheet uniformity: <±5%
SiO₂, SiNx, a-Si (B,P,Ge doped)
SiO₂, SiNx, SiC (low-temperature, low-stress coating)
Al2O3、HfO2、AlN
SiO2、MgF2、ITO、TiO2、Ta2O5、ZrO2、Al2O3
Ti、Al、Ni、Au、Ag、Cr、Pt、Cu、TiW90、Pd、Pt、Zn、Mo、W、Ta、Ru、Si、SiC、NiCr20、Nb
Ti,Al,Ni,Ag,Cr,Sn,Pt,AuGe
Sn,AuSn,Ag,Au
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